The Ultimate  Metrology for Complex and Heterogenous Thin Films Stacks



The Product technology generates unique ultrafast acoustic waves in a stack of materials.

It results in a very high precision Nano-Sonar with non-contact and non-destructive metrology capability on simple or complex stacks of metals, dielectrics, semiconductors, crystalline, poly-crystalline, amorphous or porous layers. The thickness range is a few nm to a few µm.


Adhesion failure localization and non-unifomity measurements are possible through sample mapping with a micrometric lateral resolution.